Handbook of Thin Film Deposition Processes and Techniques : Principles, Methods, Equipment and Applications
- Author
- Klaus K SchuegrafKrishna Seshan
- Publisher
- Elsevier
- Language
- English
- Edition
- 2nd ed
- Year
- 2001
- Page
- 656
- ISBN
- 9780815517788,0815517785
- File Type
- pdf
- File Size
- 8.2 MiB
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