Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control
- Author
- Donald M Mattox
- Publisher
- Noyes Publications
- Language
- English
- Year
- 1998
- Page
- 943
- ISBN
- 0815514220,9780815514220
- File Type
- pdf
- File Size
- 7.0 MiB
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