Shape and functional elements of the bulk silicon microtechnique : a manual of wet-etched silicon structures
- Author
- Joachim Frühauf
- Publisher
- Springer
- Language
- English
- Year
- 2005
- Page
- 229
- ISBN
- 9783540268765,3540268766
- File Type
- pdf
- File Size
- 9.5 MiB
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