Micro Process Engineering: Fundamentals, Devices, Fabrication, and Applications
- Author
- Norbert Kockmann, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
- Publisher
- Wiley-VCH
- Language
- English
- Year
- 2006
- Page
- 517
- ISBN
- 9783527312467,3527312463
- File Type
- pdf
- File Size
- 5.9 MiB
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