Microsystems and Nanotechnology
- Author
- Zhaoying Zhou, Zhonglin Wang, Liwei Lin
- Publisher
- Tsinghua University Press & Springer
- Language
- English
- Year
- 2012
- Page
- VI+xxii+1004
- ISBN
- 3642182925, 9783642182921, 3642182933, 9783642182938
- File Type
- pdf
- File Size
- 30.6 MiB
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