Chemical Vapour Deposition - Precursors, Processes and Applications
- Author
- Jones, Anthony C.Hitchman, Michael L.(eds.)
- Publisher
- Royal Society of Chemistry
- Language
- English
- Year
- 2009
- Page
- 606
- ISBN
- 978-1-62198-703-1,978-0-85404-465-8
- File Type
- pdf
- File Size
- 16.9 MiB
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