Laser-Assisted Microtechnology
- Author
- Professor Dr. Simeon M. Metev, Professor Dr. Vadim P. Veiko (auth.)
- Publisher
- Springer-Verlag Berlin Heidelberg
- Language
- English
- Edition
- 2
- Year
- 1998
- Page
- 270
- ISBN
- 978-3-642-87273-0,978-3-642-87271-6
- File Type
- pdf
- File Size
- 7.3 MiB
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