Materials for Microlithography. Radiation-Sensitive Polymers
- Author
- L. F. Thompson, C. G. Willson, and J. M. J. Fréchet (Eds.)
- Publisher
- American Chemical Society
- Language
- English
- Year
- 1984
- Page
- 478
- ISBN
- 9780841208711,9780841210943,0-8412-0871-9
- File Type
- pdf
- File Size
- 7.9 MiB
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