Polymers in Microlithography. Materials and Processes
- Author
- Elsa Reichmanis, Scott A. MacDonald, and Takao Iwayanagi (Eds.)
- Publisher
- American Chemical Society
- Language
- English
- Year
- 1989
- Page
- 450
- ISBN
- 9780841217010,9780841212688,0-8412-1701-7
- File Type
- pdf
- File Size
- 8.0 MiB
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