CMOS Cantilever Sensor Systems: Atomic Force Microscopy and Gas Sensing Applications
- Author
- Dr. D. Lange, Dr. O. Brand, Professor Dr. H. Baltes (auth.)
- Publisher
- Springer-Verlag Berlin Heidelberg
- Language
- English
- Edition
- 1
- Year
- 2002
- Page
- 142
- ISBN
- 978-3-642-07728-9,978-3-662-05060-6
- File Type
- pdf
- File Size
- 5.0 MiB
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