Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators
- Author
- Gerhard Lammel, Sandra Schweizer, Philippe Renaud (auth.)
- Publisher
- Springer US
- Language
- English
- Edition
- 1
- Year
- 2002
- Page
- 268
- ISBN
- 978-1-4419-4946-2,978-1-4757-6083-5
- File Type
- pdf
- File Size
- 9.8 MiB
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