Atomic Layer Deposition: Principles, Characteristics, and Nanotechnology Applications, Second Edition
- Author
- Tommi Kaariainen, David Cameron, Marja?Leena Kaariainen, Arthur Sherman(auth.)
- Language
- English
- Year
- 2013
- Page
- 264
- ISBN
- 9781118062777,9781118747407
- File Type
- pdf
- File Size
- 3.3 MiB
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