Predictive Simulation of Semiconductor Processing: Status and Challenges
- Author
- J. Dąbrowski, E. R. Weber, H.-J. Müssig (auth.), Dr. Jarek Dabrowski, Professor Dr. Eicke R. Weber (eds.)
- Publisher
- Springer-Verlag Berlin Heidelberg
- Language
- English
- Edition
- 1
- Year
- 2004
- Page
- 490
- ISBN
- 978-3-642-05804-2,978-3-662-09432-7
- File Type
- pdf
- File Size
- 13.7 MiB
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