Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines
- Author
- Alan H. Epstein (auth.), Jeffrey Lang (eds.)
- Publisher
- Springer US
- Language
- English
- Edition
- 1
- Year
- 2010
- Page
- 456
- ISBN
- 978-0-387-77746-7,978-0-387-77747-4
- File Type
- pdf
- File Size
- 10.6 MiB
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