Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
- Author
- Dr. J. Laconte, Prof. D. Flandre, Prof. J. -P. Raskin (auth.)
- Publisher
- Springer US
- Language
- English
- Edition
- 1
- Year
- 2006
- Page
- 292
- ISBN
- 978-0-387-28842-0,978-0-387-28843-7
- File Type
- pdf
- File Size
- 6.5 MiB
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