Defects in High-k Gate Dielectric Stacks: Nano-Electronic Semiconductor Devices
- Author
- MASAAKI NIWA, RIICHIROU MITSUHASHI (auth.), Evgeni Gusev (eds.)
- Publisher
- Springer Netherlands
- Language
- English
- Edition
- 1
- Year
- 2006
- Page
- 492
- ISBN
- 978-1-4020-4365-9,978-1-4020-4367-3
- File Type
- pdf
- File Size
- 26.4 MiB
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