An introduction to microelectromechanical systems engineering
- Author
- Nadim Maluf, Kirt Williams
- Publisher
- Artech House Publishers
- Language
- English
- Edition
- 2
- Year
- 2004
- Page
- 304
- ISBN
- 9781580535908,1580535909
- File Type
- pdf
- File Size
- 4.3 MiB
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