MEMS: A Practical Guide to Design, Analysis, and Applications
- Author
- Oliver Paul (auth.), Jan G. Korvink, Oliver Paul (eds.)
- Publisher
- Springer-Verlag Berlin Heidelberg
- Language
- English
- Edition
- 1
- Year
- 2006
- Page
- 900
- ISBN
- 978-3-540-21117-4,978-3-540-33655-6
- File Type
- pdf
- File Size
- 30.7 MiB
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