Introductory MEMS: Fabrication and Applications
- Author
- Thomas M. Adams, Richard A. Layton (auth.)
- Publisher
- Springer US
- Language
- English
- Edition
- 1
- Year
- 2010
- Page
- 444
- ISBN
- 978-0-387-09510-3,978-0-387-09511-0
- File Type
- pdf
- File Size
- 4.8 MiB
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