An Introduction to Surface-Micromachining
- Author
- Robert W. Johnstone, M. Parameswaran (auth.)
- Publisher
- Springer US
- Language
- English
- Edition
- 1
- Year
- 2004
- Page
- 189
- ISBN
- 978-1-4757-1077-9,978-1-4020-8021-0
- File Type
- pdf
- File Size
- 7.1 MiB
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