Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures
- Author
- Prof. Joachim Frühauf (auth.)
- Publisher
- Springer-Verlag Berlin Heidelberg
- Language
- English
- Edition
- 1
- Year
- 2005
- Page
- 222
- ISBN
- 978-3-540-22109-8,978-3-540-26876-5
- File Type
- pdf
- File Size
- 7.6 MiB
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