Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices
- Author
- L C Feldman, E. P. Gusev, E. Garfunkel (auth.), Eric Garfunkel, Evgeni Gusev, Alexander Vul’ (eds.)
- Publisher
- Springer Netherlands
- Language
- English
- Edition
- 1
- Year
- 1998
- Page
- 507
- ISBN
- 978-0-7923-5008-8,978-94-011-5008-8
- File Type
- pdf
- File Size
- 40.2 MiB
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