Reactive Sputter Deposition
- Author
- Tadayoshi Ono, Takahiro Kenmotsu, Tetsuya Muramoto (auth.), Dr. Diederik Depla, Dr. Stijn Mahieu (eds.)
- Publisher
- Springer-Verlag Berlin Heidelberg
- Language
- English
- Edition
- 1
- Year
- 2008
- Page
- 572
- ISBN
- 978-3-540-76662-9,978-3-540-76664-3
- File Type
- pdf
- File Size
- 21.2 MiB
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