High Resolution Focused Ion Beams: FIB and its Applications: The Physics of Liquid Metal Ion Sources and Ion Optics and Their Application to Focused Ion Beam Technology
- Author
- Jon Orloff, Mark Utlaut, Lynwood Swanson (auth.)
- Publisher
- Springer US
- Language
- English
- Edition
- 1
- Year
- 2003
- Page
- 304
- ISBN
- 978-1-4613-5229-7,978-1-4615-0765-9
- File Type
- pdf
- File Size
- 24.5 MiB
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