Fundamental Electron Interactions with Plasma Processing Gases
- Author
- Loucas G. Christophorou, James K. Olthoff (auth.)
- Publisher
- Springer US
- Language
- English
- Edition
- 1
- Year
- 2004
- Page
- 781
- ISBN
- 978-1-4613-4741-5,978-1-4419-8971-0
- File Type
- pdf
- File Size
- 32.0 MiB
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