Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods : Processes, Properties and Applications
- Author
- Filipe VazNicolas MartinMartin Fenker
- Publisher
- Bentham Science Publishers
- Language
- English
- Edition
- 1
- Year
- 2013
- Page
- 363
- ISBN
- 9781608051564,9781608051571
- File Type
- pdf
- File Size
- 12.6 MiB
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