Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies
- Author
- T. E. G. Daenen, D. L. De Kubber (auth.), Yves Pauleau (eds.)
- Publisher
- Springer Netherlands
- Language
- English
- Edition
- 1
- Year
- 2002
- Page
- 363
- ISBN
- 978-1-4020-0525-1,978-94-010-0353-7
- File Type
- pdf
- File Size
- 14.6 MiB
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