Chemical Vapor Deposition Polymerization: The Growth and Properties of Parylene Thin Films
- Author
- Jeffrey B. Fortin Ph.D., Toh-Ming Lu Ph.D. (auth.)
- Publisher
- Springer US
- Language
- English
- Edition
- 1
- Year
- 2004
- Page
- 102
- ISBN
- 978-1-4419-5413-8,978-1-4757-3901-5
- File Type
- pdf
- File Size
- 6.4 MiB
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