Silicon Nitride for Microelectronic Applications: Part 1 Preparation and Properties
- Author
- John T. Milek (auth.)
- Publisher
- Springer US
- Language
- English
- Edition
- 1
- Year
- 1971
- Page
- 118
- ISBN
- 978-1-4684-6164-0,978-1-4684-6162-6
- File Type
- pdf
- File Size
- 3.0 MiB
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