Micro System Technologies 90: 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10–13 September 1990
- Author
- Hugo De Man (auth.), Prof. Dr.-Ing. Herbert Reichl (eds.)
- Publisher
- Springer-Verlag Berlin Heidelberg
- Language
- English
- Edition
- 1
- Year
- 1990
- Page
- 858
- ISBN
- 978-3-642-45680-0,978-3-642-45678-7
- File Type
- pdf
- File Size
- 37.3 MiB
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