Silicon Nitride for Microelectronic Applications: Part 2 Applications and Devices
- Author
- John T. Milek (auth.)
- Publisher
- Springer US
- Language
- English
- Edition
- 1
- Year
- 1972
- Page
- 117
- ISBN
- 978-1-4615-9611-0,978-1-4615-9609-7
- File Type
- pdf
- File Size
- 3.3 MiB
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