The Physics of Micro/Nano-Fabrication
- Author
- Ivor Brodie, Julius J. Muray (auth.), Ivor Brodie, Julius J. Muray (eds.)
- Publisher
- Springer US
- Language
- English
- Edition
- 1
- Year
- 1992
- Page
- 622
- ISBN
- 978-1-4419-3221-1,978-1-4757-6775-9
- File Type
- pdf
- File Size
- 16.5 MiB
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