Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices
- Author
- S. M. Rossnagel (auth.), Orlando Auciello, Jürgen Engemann (eds.)
- Publisher
- Springer Netherlands
- Language
- English
- Edition
- 1
- Year
- 1993
- Page
- 633
- ISBN
- 978-94-010-4757-9,978-94-011-1727-2
- File Type
- pdf
- File Size
- 57.6 MiB
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