Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices

Author
S. M. Rossnagel (auth.), Orlando Auciello, Jürgen Engemann (eds.)
Publisher
Springer Netherlands
Language
English
Edition
1
Year
1993
Page
633
ISBN
978-94-010-4757-9,978-94-011-1727-2
File Type
pdf
File Size
57.6 MiB

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