Plasma electronics: applications in microelectronic device fabrication
- Author
- T. Makabe, Z. Petrovic
- Publisher
- Taylor & Francis
- Language
- English
- Edition
- 1
- Year
- 2006
- Page
- 336
- ISBN
- 0750309768,9780750309769,9781420012279
- File Type
- pdf
- File Size
- 4.3 MiB
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