Materials & Process Integration for MEMS
- Author
- Paul Muralt, Nicolas Ledermann (auth.), Francis E. H. Tay (eds.)
- Publisher
- Springer US
- Language
- English
- Edition
- 1
- Year
- 2002
- Page
- 299
- ISBN
- 978-1-4419-5303-2,978-1-4757-5791-0
- File Type
- pdf
- File Size
- 14.4 MiB
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