Sputtering by Particle Bombardment I: Physical Sputtering of Single-Element Solids

Author
Rainer Behrisch (auth.), Dr. Rainer Behrisch (eds.)
Publisher
Springer Berlin Heidelberg
Language
English
Year
1981
Page
XI, 281 pp. 117 figs.
ISBN
978-3-540-10521-3,978-3-540-38514-1
File Type
pdf
File Size
4.9 MiB

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