Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications
- Author
- Rainer Behrisch, Klaus Wittmaack (auth.), Dr. Rainer Behrisch, Dr. Klaus Wittmaack (eds.)
- Publisher
- Springer Berlin Heidelberg
- Language
- English
- Year
- 1991
- Page
- XV, 410 pp. 190 figs., 6 tabs.
- ISBN
- 978-3-540-53428-0,978-3-540-46881-3
- File Type
- pdf
- File Size
- 7.0 MiB
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