Nanoimprint Lithography: An Enabling Process for Nanofabrication
- Author
- Weimin Zhou (auth.)
- Publisher
- Springer-Verlag Berlin Heidelberg
- Language
- English
- Edition
- 1
- Year
- 2013
- Page
- 249
- ISBN
- 978-3-642-34427-5,978-3-642-34428-2
- File Type
- pdf
- File Size
- 9.0 MiB
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