Sputtering by Particle Bombardment II: Sputtering of Alloys and Compounds, Electron and Neutron Sputtering, Surface Topography

Author
Rainer Behrisch (auth.), Dr. Rainer Behrish (eds.)
Publisher
Springer Berlin Heidelberg
Language
English
Year
1983
Page
XIII, 391 pp. 155 figs.
ISBN
978-3-540-12593-8,978-3-540-38659-9
File Type
pdf
File Size
7.5 MiB

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