Handbook of Vacuum Science and Technology
- Author
- Dorothy Hoffman, Bawa Singh, John H. Thomas III
- Publisher
- Academic Press
- Language
- English
- Edition
- 1st
- Year
- 1997
- Page
- 829
- ISBN
- 9780123520654,0123520657
- File Type
- pdf
- File Size
- 46.1 MiB
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