Advanced Materials and Technologies for Micro Nano-Devices, Sensors and Actuators
- Author
- Gusev E., Garfunkel E., Dideikin A. (eds.)
- Publisher
- Springer
- Language
- English
- Year
- 2010
- Page
- 310
- ISBN
- 9048138051,9789048138050
- File Type
- pdf
- File Size
- 9.5 MiB
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