Low-K Nanoporous Interdielectrics: Materials, Thin Film Fabrications, Structures and Properties : Materials, Thin Film Fabrications, Structures and Properties
- Author
- Moonhor ReeJinhwan YooKyuyoung Heo
- Publisher
- Nova Science Publishers, Incorporated
- Language
- English
- Edition
- 1
- Year
- 2010
- Page
- 77
- ISBN
- 9781617283185,9781616687496
- File Type
- pdf
- File Size
- 2.1 MiB
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