CVD of Compound Semiconductors: Precursor Synthesis, Development and Applications
- Author
- Prof. Anthony C. Jones, Prof. Paul O'Brien(auth.)
- Publisher
- VCH Verlagsgesellschaft mbH
- Language
- English
- Year
- 1997
- Page
- 349
- ISBN
- 9783527292943,9783527614639
- File Type
- pdf
- File Size
- 11.3 MiB
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