Micro Electro Mechanical Systems (MEMS): Technology, Fabrication Processes and Applications : Technology, Fabrication Processes and Applications
- Author
- Britt EkwallMikkel Cronquist
- Publisher
- Nova Science Publishers, Incorporated
- Language
- English
- Edition
- 1
- Year
- 2010
- Page
- 405
- ISBN
- 9781613246986,9781608764747
- File Type
- pdf
- File Size
- 12.6 MiB
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