LIGA and Its Applications
- Author
- Oliver Brand, Gary K. Fedder, Christopher Hierold, Jan G. Korvink, Osamu Tabata(eds.)
- Language
- English
- Year
- 2008
- Page
- 484
- ISBN
- 9783527316984,9783527622573
- File Type
- pdf
- File Size
- 7.1 MiB
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