Integration of Ferroelectric and Piezoelectric Thin Films: Concepts and Applications for Microsystems
- Author
- Emmanuel Defay(auth.)
- Publisher
- Wiley-ISTE
- Language
- English
- Year
- 2011
- Page
- 412
- ISBN
- 9781848212398,9781118616635
- File Type
- pdf
- File Size
- 8.9 MiB
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