Polymers for Microelectronics. Resists and Dielectrics
- Author
- Larry F. Thompson, C. Grant Willson, and Seiichi Tagawa (Eds.)
- Publisher
- American Chemical Society
- Language
- English
- Year
- 1994
- Page
- 569
- ISBN
- 9780841227217,9780841213937,0-8412-2721-7
- File Type
- pdf
- File Size
- 45.6 MiB
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