Handbook of Multilevel Metallization for Integrated Circuits - Materials, Technology, and Applications
- Author
- Wilson, S.R.Tracy, C.J.Freeman, J.L., Jr.(eds.)
- Publisher
- William Andrew Publishing/Noyes
- Language
- English
- Year
- 1993
- Page
- 887
- ISBN
- 978-0-8155-1761-0,978-0-8155-1340-7
- File Type
- pdf
- File Size
- 19.1 MiB
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