Thin Film Materials Technology - Sputtering of Compound Materials
- Author
- Wasa, KiyotakaKitabatake, MakotoAdachi, Hideaki
- Publisher
- William Andrew Publishing/Noyes
- Language
- English
- Year
- 2004
- Page
- 531
- ISBN
- 978-0-8155-1931-7,978-0-8155-1483-1 (William Andrew Publishing) 978-3-540-21118-1 (Springer-Verlag)
- File Type
- pdf
- File Size
- 7.1 MiB
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