Handbook of Thin-Film Deposition Processes and Techniques - Principles, Methods, Equipment and Applications
- Author
- Seshan, K.(eds.)
- Publisher
- William Andrew Publishing/Noyes
- Language
- English
- Edition
- 2nd Edition
- Year
- 2002
- Page
- 676
- ISBN
- 978-0-8155-1778-8,978-0-8155-1442-8
- File Type
- pdf
- File Size
- 7.5 MiB
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